(Last minute addition)VIBRATIONAL SPECTRA OF VAPOR DEPOSITED BINARY BOROSILICATE GLASSES

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1971

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Ohio State University

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Room temperature infrared absorption spectra in the range $4000-250 cm^{-1}$ of binary borosilicate thin glass films deposited by reacting argon-diluted $SiH_{4}-B_{2}H_{6}-O_{2}$ mixtures at heated silicon substrate (300$-400^{\circ} C$) have been obtained throughout the composition range. Spectra of the end components are found to be in good agreement with those of vitreous $SiO_{2}$ and $B_{2}O_{3}$ prepared from the liquid state. The band shapes, intensities, and frequencies of maximum absorption of the observed bands have been studied as a function of composition. Insight into the “mixing” nature of these vapor-deposited glassy solids have been obtained from an analysis of the distribution of $Si-O-Si, B-O-B$ and $B-O-Si$ bonds as a function of composition.

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Author Institution: Corporate Research and Development, General Electric Company

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