MATRIX ISOLATION STUDIES OF CHEMICAL VAPOR DEPOSITION: THE $(CH_{3})_{3}Ga/AsH_{3}$ and $(CH_{3})_{3}Ga/PH_{3}$ SYSTEMS

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1991

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Ohio State University

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Lewis acid-base concept predicts the initial formation of a 1:1 molecular adduct between trimethylgallium and arsine, which are gaseous precursors for the chemical vapor deposition of the semiconductor gallium arsenide. Isolation and characterization of this $(CH_{3}){3}Ga\cdot AsH{3} $ adduct for the first time using infrared matrix isolation technique showed that it has an effective symmetry of C3v. The corresponding adduct of phosphine with trimethylgallium has also been isolated and characterized using this technique. In addition, results of gas-phase studies indicate that both adducts may exist in the gas phase. Subsequent 193 nm photolysis of the ${(CH_{3})}{3}Ga\cdot AsH{3} $ adduct shows that an eliminated methyl radical abstracts a hydrogen to form methane and probably (CH3)2GaAsH2. The photolysis of ${(CH_{3})}_{3}Ga $ at 193 nm has also been studied and results strongly indicate the production of dimethylgallium and methyl radicals.

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Author Institution: Department of Chemistry, University of Cincinnati

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