MATRIX ISOLATION STUDIES OF CHEMICAL VAPOR DEPOSITION: THE $(CH_{3})_{3}Ga/AsH_{3}$ and $(CH_{3})_{3}Ga/PH_{3}$ SYSTEMS
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Abstract
Lewis acid-base concept predicts the initial formation of a 1:1 molecular adduct between trimethylgallium and arsine, which are gaseous precursors for the chemical vapor deposition of the semiconductor gallium arsenide. Isolation and characterization of this $(CH_{3}){3}Ga\cdot AsH{3} $ adduct for the first time using infrared matrix isolation technique showed that it has an effective symmetry of
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Author Institution: Department of Chemistry, University of Cincinnati